VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
NBS SRM 1521 B-70: p-Si(B) with 2eV FG after Ion Etching
1

NORM
REGULAR
3
0
0
0
0
0
3

NBS SRM 1521 B-70: p-Si(B) with 2eV FG after Ion Etching
2003
5
10
13
43
31
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
30.01
1
0
2
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
294
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
6
4.00E-06
0
0
0
0
512
0
147
1.09339
1.09429
12
1.09339
27
1.09339
25
1.09339
33
1.0934
41
1.0934
26
1.0934
27
1.09341
14
1.09341
19
1.09341
19
1.09342
39
1.09342
21
1.09342
28
1.09343
47
1.09343
30
1.09344
40
1.09344
45
1.09344
21
1.09345
40
1.09345
24
1.09345
36
1.09346
38
1.09346
16
1.09346
35
1.09347
45
1.09347
45
1.09348
24
1.09348
22
1.09348
43
1.09349
9
1.09349
6
1.09349
17
1.0935
33
1.0935
24
1.0935
21
1.09351
12
1.09351
19
1.09351
27
1.09352
15
1.09352
15
1.09353
30
1.09353
27
1.09353
44
1.09354
10
1.09354
21
1.09354
14
1.09355
12
1.09355
42
1.09355
8
1.09356
19
1.09356
17
1.09356
20
1.09357
26
1.09357
13
1.09358
45
1.09358
15
1.09358
27
1.09359
18
1.09359
14
1.09359
20
1.0936
38
1.0936
32
1.0936
20
1.09361
20
1.09361
0
1.09361
30
1.09362
23
1.09362
36
1.09363
20
1.09363
23
1.09363
19
1.09364
23
1.09364
37
1.09364
6
1.09365
37
1.09365
35
1.09365
22
1.09366
13
1.09366
22
1.09367
22
1.09367
23
1.09367
10
1.09368
0
1.09368
8
1.09368
27
1.09369
35
1.09369
21
1.09369
18
1.0937
6
1.0937
4
1.0937
24
1.09371
25
1.09371
17
1.09372
19
1.09372
23
1.09372
19
1.09373
27
1.09373
28
1.09373
28
1.09374
22
1.09374
12
1.09374
35
1.09375
28
1.09375
21
1.09375
25
1.09376
26
1.09376
32
1.09377
40
1.09377
13
1.09377
64
1.09378
40
1.09378
39
1.09378
17
1.09379
35
1.09379
41
1.09379
56
1.0938
36
1.0938
35
1.0938
53
1.09381
57
1.09381
53
1.09382
84
1.09382
86
1.09382
102
1.09383
94
1.09383
97
1.09383
128
1.09384
131
1.09384
140
1.09384
147
1.09385
134
1.09385
143
1.09385
137
1.09386
137
1.09386
142
1.09387
86
1.09387
127
1.09387
95
1.09388
94
1.09388
81
1.09388
79
1.09389
72
1.09389
73
1.09389
54
1.0939
48
1.0939
40
1.0939
52
1.09391
56
1.09391
29
1.09391
46
1.09392
46
1.09392
54
1.09393
42
1.09393
40
1.09393
13
1.09394
37
1.09394
31
1.09394
32
1.09395
30
1.09395
29
1.09395
33
1.09396
26
1.09396
13
1.09396
46
1.09397
13
1.09397
42
1.09398
11
1.09398
25
1.09398
19
1.09399
26
1.09399
26
1.09399
19
1.094
6
1.094
18
1.094
9
1.09401
32
1.09401
29
1.09401
22
1.09402
20
1.09402
21
1.09403
24
1.09403
11
1.09403
11
1.09404
29
1.09404
15
1.09404
26
1.09405
13
1.09405
12
1.09405
27
1.09406
19
1.09406
9
1.09406
0
1.09407
31
1.09407
3
1.09408
39
1.09408
16
1.09408
23
1.09409
32
1.09409
10
1.09409
14
1.0941
11
1.0941
11
1.0941
13
1.09411
22
1.09411
24
1.09411
39
1.09412
20
1.09412
23
1.09412
29
1.09413
18
1.09413
5
1.09414
4
1.09414
26
1.09414
32
1.09415
41
1.09415
26
1.09415
33
1.09416
48
1.09416
37
1.09416
23
1.09417
24
1.09417
16
1.09417
31
1.09418
23
1.09418
19
1.09419
22
1.09419
15
1.09419
32
1.0942
29
1.0942
24
1.0942
26
1.09421
17
1.09421
8
1.09421
21
1.09422
12
1.09422
25
1.09422
16
1.09423
16
1.09423
14
1.09423
21
1.09424
26
1.09424
28
1.09425
22
1.09425
20
1.09425
21
1.09426
27
1.09426
15
1.09426
2
1.09427
22
1.09427
28
1.09427
24
1.09428
19
1.09428
17
1.09428
8
1.09429
38
1.09429
17
1.09429

NBS SRM 1521 B-70: p-Si(B) with 2eV FG after Ion Etching
2003
5
10
13
43
31
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
30.01
1
0
2
1000
2000
55
0
data_2
data_2
-1
Binding energy
eV
112
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
20
4.00E-06
0
0
0
0
512
31
1886
1.10118
1.10197
217
1.10118
211
1.10118
213
1.10118
205
1.10119
205
1.10119
208
1.10119
186
1.1012
203
1.1012
185
1.1012
192
1.10121
200
1.10121
182
1.10121
161
1.10122
207
1.10122
194
1.10122
162
1.10122
200
1.10123
205
1.10123
188
1.10123
169
1.10124
189
1.10124
168
1.10124
187
1.10125
187
1.10125
203
1.10125
185
1.10126
161
1.10126
166
1.10126
169
1.10127
160
1.10127
181
1.10127
177
1.10127
155
1.10128
178
1.10128
172
1.10128
184
1.10129
169
1.10129
152
1.10129
181
1.1013
191
1.1013
172
1.1013
164
1.10131
159
1.10131
179
1.10131
182
1.10132
178
1.10132
144
1.10132
162
1.10132
183
1.10133
168
1.10133
170
1.10133
160
1.10134
164
1.10134
143
1.10134
144
1.10135
153
1.10135
173
1.10135
150
1.10136
148
1.10136
142
1.10136
159
1.10137
159
1.10137
174
1.10137
143
1.10138
162
1.10138
137
1.10138
140
1.10138
154
1.10139
137
1.10139
149
1.10139
162
1.1014
167
1.1014
145
1.1014
125
1.10141
134
1.10141
126
1.10141
138
1.10142
144
1.10142
132
1.10142
135
1.10143
146
1.10143
146
1.10143
129
1.10143
105
1.10144
137
1.10144
115
1.10144
106
1.10145
129
1.10145
134
1.10145
124
1.10146
128
1.10146
148
1.10146
127
1.10147
127
1.10147
101
1.10147
131
1.10148
138
1.10148
121
1.10148
126
1.10148
112
1.10149
162
1.10149
133
1.10149
127
1.1015
121
1.1015
135
1.1015
120
1.10151
120
1.10151
129
1.10151
130
1.10152
119
1.10152
148
1.10152
134
1.10153
132
1.10153
133
1.10153
144
1.10153
122
1.10154
132
1.10154
157
1.10154
153
1.10155
160
1.10155
135
1.10155
166
1.10156
164
1.10156
149
1.10156
139
1.10157
177
1.10157
180
1.10157
181
1.10158
197
1.10158
185
1.10158
202
1.10158
178
1.10159
215
1.10159
195
1.10159
185
1.1016
208
1.1016
208
1.1016
205
1.10161
225
1.10161
227
1.10161
217
1.10162
222
1.10162
203
1.10162
222
1.10162
235
1.10163
243
1.10163
205
1.10163
224
1.10164
214
1.10164
223
1.10164
274
1.10165
208
1.10165
221
1.10165
259
1.10166
265
1.10166
273
1.10166
304
1.10167
332
1.10167
365
1.10167
420
1.10167
542
1.10168
580
1.10168
715
1.10168
785
1.10169
965
1.10169
1112
1.10169
1203
1.1017
1311
1.1017
1430
1.1017
1523
1.10171
1555
1.10171
1698
1.10171
1724
1.10172
1815
1.10172
1886
1.10172
1799
1.10172
1680
1.10173
1442
1.10173
1309
1.10173
1038
1.10174
743
1.10174
562
1.10174
397
1.10175
289
1.10175
196
1.10175
138
1.10176
106
1.10176
94
1.10176
77
1.10177
73
1.10177
56
1.10177
55
1.10177
53
1.10178
49
1.10178
63
1.10178
44
1.10179
42
1.10179
53
1.10179
56
1.1018
43
1.1018
40
1.1018
47
1.10181
52
1.10181
46
1.10181
50
1.10181
55
1.10182
37
1.10182
46
1.10182
46
1.10183
33
1.10183
35
1.10183
44
1.10184
51
1.10184
47
1.10184
32
1.10185
35
1.10185
46
1.10185
38
1.10186
46
1.10186
38
1.10186
45
1.10186
40
1.10187
49
1.10187
35
1.10187
40
1.10188
35
1.10188
49
1.10188
50
1.10189
40
1.10189
34
1.10189
47
1.1019
37
1.1019
34
1.1019
40
1.1019
52
1.10191
41
1.10191
47
1.10191
39
1.10192
46
1.10192
54
1.10192
31
1.10193
37
1.10193
32
1.10193
42
1.10194
33
1.10194
53
1.10194
48
1.10195
44
1.10195
35
1.10195
48
1.10195
52
1.10196
48
1.10196
56
1.10196
43
1.10197
33
1.10197
36
1.10197

NBS SRM 1521 B-70: p-Si(B) with 2eV FG after Ion Etching
2003
5
10
13
43
31
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
30.01
1
0
2
1000
2000
55
0
data_3
data_3
-1
Binding energy
eV
542
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
6
4.00E-06
0
0
0
0
512
0
281
1.08071
1.08185
23
1.08071
33
1.08072
27
1.08072
34
1.08073
30
1.08073
41
1.08074
24
1.08074
28
1.08075
32
1.08075
30
1.08075
40
1.08076
24
1.08076
35
1.08077
35
1.08077
16
1.08078
22
1.08078
38
1.08079
20
1.08079
32
1.0808
20
1.0808
9
1.0808
26
1.08081
43
1.08081
36
1.08082
32
1.08082
40
1.08083
42
1.08083
41
1.08084
28
1.08084
21
1.08084
39
1.08085
13
1.08085
16
1.08086
30
1.08086
38
1.08087
36
1.08087
30
1.08088
8
1.08088
30
1.08088
35
1.08089
21
1.08089
35
1.0809
40
1.0809
21
1.08091
5
1.08091
36
1.08092
16
1.08092
32
1.08092
27
1.08093
21
1.08093
24
1.08094
37
1.08094
21
1.08095
31
1.08095
10
1.08096
29
1.08096
31
1.08096
18
1.08097
13
1.08097
26
1.08098
24
1.08098
26
1.08099
13
1.08099
13
1.081
22
1.081
35
1.08101
28
1.08101
18
1.08101
19
1.08102
38
1.08102
20
1.08103
23
1.08103
26
1.08104
20
1.08104
19
1.08105
29
1.08105
29
1.08105
23
1.08106
32
1.08106
33
1.08107
15
1.08107
19
1.08108
31
1.08108
26
1.08109
26
1.08109
20
1.08109
33
1.0811
27
1.0811
21
1.08111
21
1.08111
12
1.08112
6
1.08112
39
1.08113
14
1.08113
24
1.08113
28
1.08114
25
1.08114
38
1.08115
9
1.08115
22
1.08116
27
1.08116
35
1.08117
25
1.08117
29
1.08117
28
1.08118
21
1.08118
35
1.08119
31
1.08119
36
1.0812
44
1.0812
34
1.08121
22
1.08121
49
1.08121
35
1.08122
36
1.08122
50
1.08123
47
1.08123
66
1.08124
38
1.08124
44
1.08125
70
1.08125
72
1.08125
45
1.08126
68
1.08126
94
1.08127
85
1.08127
110
1.08128
111
1.08128
117
1.08129
124
1.08129
159
1.08129
132
1.0813
183
1.0813
160
1.08131
189
1.08131
214
1.08132
232
1.08132
221
1.08133
250
1.08133
242
1.08133
233
1.08134
281
1.08134
267
1.08135
259
1.08135
231
1.08136
244
1.08136
262
1.08137
255
1.08137
201
1.08137
190
1.08138
197
1.08138
152
1.08139
147
1.08139
197
1.0814
147
1.0814
124
1.08141
112
1.08141
123
1.08141
107
1.08142
100
1.08142
92
1.08143
89
1.08143
74
1.08144
58
1.08144
70
1.08145
74
1.08145
69
1.08145
74
1.08146
48
1.08146
41
1.08147
35
1.08147
42
1.08148
43
1.08148
41
1.08149
30
1.08149
45
1.08149
47
1.0815
38
1.0815
26
1.08151
28
1.08151
35
1.08152
27
1.08152
8
1.08153
28
1.08153
17
1.08153
29
1.08154
5
1.08154
21
1.08155
21
1.08155
25
1.08156
24
1.08156
23
1.08156
37
1.08157
26
1.08157
15
1.08158
19
1.08158
12
1.08159
21
1.08159
8
1.0816
14
1.0816
18
1.0816
15
1.08161
23
1.08161
10
1.08162
18
1.08162
23
1.08163
15
1.08163
20
1.08164
33
1.08164
21
1.08164
23
1.08165
17
1.08165
9
1.08166
11
1.08166
13
1.08167
5
1.08167
17
1.08168
13
1.08168
16
1.08168
19
1.08169
23
1.08169
28
1.0817
25
1.0817
28
1.08171
20
1.08171
12
1.08171
14
1.08172
30
1.08172
9
1.08173
25
1.08173
15
1.08174
10
1.08174
11
1.08175
18
1.08175
19
1.08175
18
1.08176
29
1.08176
29
1.08177
10
1.08177
24
1.08178
13
1.08178
7
1.08179
14
1.08179
8
1.08179
20
1.0818
20
1.0818
21
1.08181
24
1.08181
29
1.08182
21
1.08182
15
1.08183
15
1.08183
7
1.08183
25
1.08184
0
1.08184
25
1.08185
end of experiment
